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Synthesis and Characterization of Some Acrylate Copolymers and their Evaluation as Aqueous Developable Photoresists

University of Alexandria, Institute of Graduate Studies & Research, Materials Science Department, 163 Horreya Avenue, Shatby 21526, Egypt, eldemerd{at}yahoo.co.uk

Wagih Abdel-Alim

University of Alexandria, Institute of Graduate Studies & Research, Materials Science Department, 163 Horreya Avenue, Shatby 21526, Egypt

Sayed Ahmed

University of Alexandria, Institute of Graduate Studies & Research, Materials Science Department, 163 Horreya Avenue, Shatby 21526, Egypt

In the recent past, it has been found that the use of onium salts as acid-generating species has improved the performance of photoresists, particularly for microelectronic applications. However, little research has been dedicated to the use of these photo-initiators in aqueous-developable resists. This work describes the synthesis and characterization of some water-soluble polymers and investigates the feasibility of employing one of the onium salts in the formulation of a resist polymer for use in aqueous conditions. The ability of this onium salt to photo-initiate the cationic polymerization of epoxies residues was exploited using water-soluble copolymers, containing glycidyl methacrylate (GMA). The comonomers included methacrylic acid. Various copolymers were prepared by radical copolymerization typically in methyl ethyl ketone. It was found that the copolymer containing 85 mol.% of GMA unit in feed was soluble in aqueous base and crosslinked in the presence of photogenerated acid caused by acid-initiated ring opening polymerization of the pendant epoxide groups. A good pattern with reasonable resolution was attained by exposure to a UV lamp with = 365 nm light followed by a post exposure bake at 80^° C for 1 min.

Key Words: methacrylate and glycidyl methacrylate copolymers • onium salts

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This version was published on August 1, 2007

High Performance Polymers, Vol. 19, No. 4, 439-450 (2007)
DOI: 10.1177/0954008306074485


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This Article Abstract Free Full Text (Free PDF) Free Alert me when this article is cited Alert me if a correction is posted Services Email this article to a friend Similar articles in this journal Similar articles in Web of Science Alert me to new issues of the journal Add to Saved Citations Download to citation manager Request Permissions Request Reprints Add to My Marked Citations Citing Articles Citing Articles via Google Scholar Citing Articles via Scopus Google Scholar Articles by El-Demerdash, A.-G. Articles by Ahmed, S. Search for Related Content Social Bookmarking                         What's this?